Most high technology manufacturers rely on air ionization to control problems associated with static charge-thus increasing yields, minimizing down-time and microprocessor lock-up and reducing cost of ownership. Unfortunately, mini-environments and process equipment prevent traditional ionizers from reaching one of the most important production areas-the inside of process equipment.
Unit of Measure

Specifications

Brands

N/A Simco-Ion™

Ion Balance

N/A ±25 V at specified flow and pressure measured at 6" from CPM; tested in accordance with Standard American National Standards Institute (ANSI) / Electrostatic Discharge (ESD) STM3.1-2006 Ionization

Discharge Time

N/A 10 sec Airflow rate of 120 SCFH (2 SCFM) Measured through 6 in. long, 1/4 in. ID PTFE (Polytetrafluoroethylene) tube held 6 in. from the CPM

Ion Emission

N/A Steady-State Direct Current (DC)

Emitter Points

N/A Single Crystal Silicon (SCSi) Tungsten

Alternating Current (AC) Input Voltage

N/A 120 V

Frequency

N/A 50 to 60 Hz

Approximate Power

N/A 2 W

Maximum Ambient Temperature

N/A -20 to 60 ºC-4 to 140 ºF

Inlet Gas Supply Temperature

N/A 120 ºC250 ºF

Ambient Environment Temperature

N/A 23 ºC73 ºF
Minimum Gas Flow Rate1 N/A 1.5 ft³/min

Input Pressure

N/A 10 to 50 psi safe range; unit is NOT designed to withstand high pressures; should be installed downstream from any valves with the output open to atmospheric pressure
Manifold Pressure2 N/A 0 to 50 psi

Manifold

N/A PTFE (Polytetrafluoroethylene) tubing with flare fittings for interconnects; nitrogen 3/8" (9.5 mm) ID tubing; CDA 1/4" (6 mm) ID tubing; details on manifold design, refer to Simco-Ion Technical Note, In-line Gas Ionization Considerations 4210 Use and Application Guide

Gas Connectors

N/A 1/4" NPT female PTFE (Polytetrafluoroethylene) fittings at both gas input and output

Cleanliness

N/A ISO 14644-1 Class 5 standards (Fed. Std. 209e Class 100 equivalent)

Gas Ionization

N/A Clean Dry Air (CDA) Nitrogen

Casing

N/A Power-Coated White Aluminum

Mounting

N/A 4-6/32 threaded holes provided Wall and bulkhead mount brackets available
Weight3 N/A 37 oz1.04 kg

Maintenance

N/A Two-years Continuous Use (Suggested)

Warranty

N/A 2 year Limited Warranty

Industry Standards/Certifications

N/A European Conformity (CE) Restriction of Hazardous Substances (RoHS) Compliant

Dimensions

Depth

N/A 2.4 in6.1 cm

Length

N/A 4.75 in12.1 cm

Width

N/A 3.13 in8.0 cm

Additional Information

Additional Information

N/A In the heart of process equipment, where limited space or proximity to sensitive products makes ionizing bars impractical, the Model 4210 In-line Gas Ionizer pipes compressed ionized gas for balanced charge neutralization. Either Clean Dry Air (CDA) or nitrogen can be ionized, depending on process requirements. The ionized gas can be plumbed to the static-sensitive product or fixture using ultra-clean PTFE (Polytetrafluoroethylene) tubing, bathing the area in ions. Manifolds can be custom designed which provide ions to the desired area, while staying clear of moving products and robotics.

Features

Features

N/A
  • Easily connects to delivery manifolds
  • Ionizes either Clean Dry Air or Nitrogen
  • IsoStat® technology
  • Steady-state DC ion emission
  • Ultra-clean emitter points (u/un models)
  • Ultra-clean construction with carefully controlled current and geometry

Benefits

Benefits

N/A
  • Precise delivery of balanced ionization to confined areas; ideal for use in caustic environments where emitter points cannot be exposed
  • Can be used in a variety of applications
  • No calibration needed
  • Fast discharge times
  • Provide ISO 14644-1, Class 3 cleanliness
  • Maintenance-free for two years

Ultra-Clean Ionization

Ultra-Clean Ionization

N/A When provided with gas from an ultra-clean source, the 4210u and 4210un operate 10 times better than Class 3 cleanroom requirements. Careful material selection and control of internal geometry ensure ultra-clean ionized gas delivery.

Applications

Applications

N/A The 4210 has been used to solve Static Charge Problems in a Variety of Wafer Fab applications, Including Steppers, Spin Rinser Dryers, Load and Unload Stations, Disk Certifiers, Wafer Management Systems, and Furnaces.

The 4210 Family

The 4210 Family

N/A Versions of the 4210 are available for use with both CDA and nitrogen, using either ultra-clean emitter points or high output tungsten alloy points.
  • 1 Maximum set by manifold back pressure.
  • 2 To achieve ionization.
  • 3 Including fittings and power cord.

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~Rudolf Flesch

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