Brands |
N/A Simco-Ion™ |
Ion Balance |
N/A ±25 V or less range with no output manifold, measured at 150 mm (6") from CPM, standard nitrogen flowrate 40 LPM at 36.5 kPa (1.4 CFM at 5.3 PSI) |
Discharge Time |
N/A With manifold 1000-100V, 100 sec or less (typ), measured at 500 mm (19.6") with custom manifold Without manifold ±1000-100 V, 10 sec or less (typ), measured at 150 mm (6") to CPM, nitrogen flowrate 40 LPM at 36.5 kPa (1.4 CFM at 5.3 PSI) |
Ion Emission |
N/A High Frequency Alternating Current (AC) Corona Discharge |
Cleanroom Compatibility |
N/A ISO Class 1 (0.1 μm particles) ISO Class 1 (0.01 μm particles) |
Ion Emitter |
N/A Single Crystal Silicon (SCSi) |
Gas |
N/A Nitrogen, Minimum Purity 99.999% |
Minimum Gas Flow Rate at 36.5 Kilopascal (kPa) (5.3 Pound Per Square Inch (psi)) Pressure |
N/A 40 L/min |
Recommended Gas Flow Rate at 171 Kilopascal (kPa) (24.8 Pound Per Square Inch (psi)) Pressure |
N/A 90 L/min |
Maximum Gas Flow Rate at 197 Kilopascal (kPa) (28.5 Pound Per Square Inch (psi)) Pressure |
N/A 100 L/min |
Maximum Gas Supply Temperature |
N/A 60 ºC |
Inlet Gas Connector |
N/A Swagelok® 316L SST 1/8" FNPT Adapter to 3/8" OD Tubing (#SS-600-7-2) |
Outlet Gas Connector |
N/A Internal 1/4 NPT Female Threaded In Ionizer Block Optional Manifold 1/4 NPT Male |
| Ionizing Unit Maximum Operating Temperature1 | N/A 15 to 60 ºC |
Control System |
N/A Microprocessor Controlled Ionization, Self Balancing |
Alarms |
N/A High Voltage (HV) Alarm Low Gas Flow Alarm Low Ions Alarm |
Maximum Direct Current (DC) Voltage of Status Relays 1 and 2 at 0.2 Ampere (A) Current |
N/A ±24 V |
Filter Cartridge |
N/A Disposable, 99.999% Filtration Efficiency for 0.01 Micron Particles |
Weight without Manifold |
N/A 0.64 kg1.4 lb |
Enclosure |
N/A Stainless Steel |
Mounting |
N/A M5 screws should not exceed 10 mm in length Two M5 threaded inserts provided on bottom of unit |
Industry Standards/Certifications |
N/A European Conformity (CE) Restriction of Hazardous Substances (RoHS) Compliant |
Direct Current (DC) Input Voltage at 0.25 Ampere (A) Current |
N/A +24 V |
Voltage Tolerance (±) at 0.25 Ampere (A) Current |
N/A 5 % |
Typical Power |
N/A 6 W |
Height without Manifold |
N/A 6.0 in152.4 mm |
Width without Manifold |
N/A 2.85 in72.4 mm |
Length without Manifold |
N/A 1.26 in32 mm |
Additional Information |
N/A The Model 4214 In-line Ionizer utilizes high frequency AC ionization technology to provide a fast discharge time for optimal static charge neutralization. The microprocessor controls and small form-factor make it an ideal nitrogen ionizer for in-tool integration. The ultra-clean design, utilizing an internal particle containment system assure the cleanest, most compatible ionization available for critical semiconductor processes. By providing a continuous flow of nitrogen through the ionizer, this breakthrough technology meets Extended ISO Class 1 cleanliness requirements, making it ideal for 22 nm and below technology nodes |
Features |
N/A
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Benefits |
N/A
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Defining Extended International Organization for Standardization (ISO) Class 1 Cleanliness |
N/A
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Easy Tool Integration |
N/A The Model 4214 is a stand-alone unit providing a high voltage power supply, an ultra-clean ionization cell, and I/O connections for remote status and control of ionization all within a small footprint package. The end-user's nitrogen is plumbed through the unit where it is ionized and then delivered to the tool's static-sensitive product or process area. Custom manifolds or nozzles can be attached to shape the area of coverage to the customer's requirements. |
Creative thinking may mean simply the realization that there’s no particular virtue in doing things the way they always have been done
~Rudolf Flesch
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