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Simco-Ion's In-line Ultra-clean Nitrogen Ionizer Model 4214 is specifically designed to ionize a nitrogen gas flow in ultra-clean semiconductor or other high purity processes. Unlike other nitrogen ionizers which depend on the trace gases in the nitrogen stream to produce ionization, this state-of-the-art product ionizes nitrogen molecules using a small, but efficient power supply.
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Model 4214 In-line Ultra-Clean Nitrogen Ionizers

Model 4214 In-line Ultra-Clean Nitrogen Ionizer
Model 4214 In-line Ultra-Clean Nitrogen Ionizers

Silicon Emitter Point Kit
Model 4214 In-line Ultra-Clean Nitrogen Ionizers

Filter Cartridge Kit
Description N/A Simco-Ion's In-line Ultra-clean Nitrogen Ionizer Model 4214 is specifically designed to ionize a nitrogen gas flow in ultra-clean semiconductor or other high purity processes. Unlike other nitrogen ionizers which depend on the trace gases in the nitrogen stream to produce ionization, this state-of-the-art product ionizes nitrogen molecules using a small, but efficient power supply. N/A For 4214 In-line Ultra-Clean Gas Ionizer N/A 99.99998% efficient (filter cartridge, 2 O-rings)
Brands N/A Simco-Ion™ N/A N/A
Direct Current (DC) Input Voltage at 0.25 Ampere (A) Current N/A +24 V N/A N/A
Voltage Tolerance (±) at 0.25 Ampere (A) Current N/A 5 % N/A N/A
Typical Power N/A 6 W N/A N/A
Ion Balance N/A ±25 V or less range with no output manifold, measured at 150 mm (6") from CPM, standard nitrogen flowrate 40 LPM at 36.5 kPa (1.4 CFM at 5.3 PSI) N/A N/A
Discharge Time N/A With manifold 1000-100V, 100 sec or less (typ), measured at 500 mm (19.6") with custom manifold Without manifold ±1000-100 V, 10 sec or less (typ), measured at 150 mm (6") to CPM, nitrogen flowrate 40 LPM at 36.5 kPa (1.4 CFM at 5.3 PSI) N/A N/A
Ion Emission N/A High Frequency Alternating Current (AC) Corona Discharge N/A N/A
Cleanroom Compatibility N/A ISO Class 1 (0.1 μm particles) ISO Class 1 (0.01 μm particles) N/A N/A
Ion Emitter N/A Single Crystal Silicon (SCSi) N/A N/A
Gas N/A Nitrogen, Minimum Purity 99.999% N/A N/A
Minimum Gas Flow Rate at 36.5 Kilopascal (kPa) (5.3 Pound Per Square Inch (psi)) Pressure N/A 40 L/min N/A N/A
Recommended Gas Flow Rate at 171 Kilopascal (kPa) (24.8 Pound Per Square Inch (psi)) Pressure N/A 90 L/min N/A N/A
Maximum Gas Flow Rate at 197 Kilopascal (kPa) (28.5 Pound Per Square Inch (psi)) Pressure N/A 100 L/min N/A N/A
Maximum Gas Supply Temperature N/A 60 ºC N/A N/A
Inlet Gas Connector N/A Swagelok® 316L SST 1/8" FNPT Adapter to 3/8" OD Tubing (#SS-600-7-2) N/A N/A
Outlet Gas Connector N/A Internal 1/4 NPT Female Threaded In Ionizer Block Optional Manifold 1/4 NPT Male N/A N/A
Ionizing Unit Maximum Operating Temperature1 N/A 15 to 60 ºC N/A N/A
Control System N/A Microprocessor Controlled Ionization, Self Balancing N/A N/A
Alarms N/A High Voltage (HV) Alarm Low Gas Flow Alarm Low Ions Alarm N/A N/A
Maximum Direct Current (DC) Voltage of Status Relays 1 and 2 at 0.2 Ampere (A) Current N/A ±24 V N/A N/A
Filter Cartridge N/A Disposable, 99.999% Filtration Efficiency for 0.01 Micron Particles N/A N/A
Height without Manifold N/A 6.0 in152.4 mm N/A N/A
Width without Manifold N/A 2.85 in72.4 mm N/A N/A
Length without Manifold N/A 1.26 in32 mm N/A N/A
Weight without Manifold N/A 0.64 kg1.4 lb N/A N/A
Enclosure N/A Stainless Steel N/A N/A
Mounting N/A M5 screws should not exceed 10 mm in length Two M5 threaded inserts provided on bottom of unit N/A N/A
Industry Standards/Certifications N/A European Conformity (CE) Restriction of Hazardous Substances (RoHS) Compliant N/A N/A
Additional Information N/A The Model 4214 In-line Ionizer utilizes high frequency AC ionization technology to provide a fast discharge time for optimal static charge neutralization. The microprocessor controls and small form-factor make it an ideal nitrogen ionizer for in-tool integration. The ultra-clean design, utilizing an internal particle containment system assure the cleanest, most compatible ionization available for critical semiconductor processes. By providing a continuous flow of nitrogen through the ionizer, this breakthrough technology meets Extended ISO Class 1 cleanliness requirements, making it ideal for 22 nm and below technology nodes N/A N/A
Features N/A
  • Extended ISO Class 1 cleanliness
  • Alarms indicating low ion output (maintenance required), high voltage power supply failure, and low gas flow
  • Standby mode
  • Self-balanced ionization
  • Auto shutoff with low gas flow
  • Compact size
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Benefits N/A
  • Provides clean ionization for any ultra-clean process; ideal for 22 nm and below technology nodes
  • Constant ionizer status monitoring for continued continuous optimal performance
  • Nitrogen saving Standby mode that reduces gas flow while maintaining fast ionization start up
  • Eliminates calibration or difficult setup
  • Prevents product damage
  • Designed for in-tool applications with tight space constraints
  • Connects to tool power for simple integration
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Defining Extended International Organization for Standardization (ISO) Class 1 Cleanliness N/A
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Easy Tool Integration N/A The Model 4214 is a stand-alone unit providing a high voltage power supply, an ultra-clean ionization cell, and I/O connections for remote status and control of ionization all within a small footprint package. The end-user's nitrogen is plumbed through the unit where it is ionized and then delivered to the tool's static-sensitive product or process area. Custom manifolds or nozzles can be attached to shape the area of coverage to the customer's requirements. N/A N/A
  • 1 Custom manifold per individual specification

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