Brands |
N/A AAF Flanders® MEGAcel® |
Industry Standards/Certifications |
N/A I300I Specifications IEST-RP-CC007 (Institute of Environmental Sciences and Technology) ISO 7 (International Organization for Standardization) UL 900 (Underwriters Laboratories) Classified ULC S111 (Underwriters Laboratories of Canada) |
State-of-the-Art Design |
N/A
Designed to combine maximum efficiency with lowest pressure drop, the MEGAcel® media pack is employed in a variety of design and size configurations, making the MEGAcel® suitable for numerous application requirements. The ePTFE media pack is produced to ensure precision in pleat spacing and height, thereby reducing "dead spots" and promoting consistent and uniform air distribution throughout the filter. The pleat design allows the air to move throughout the entire depth of the filter, utilizing the full cleaning capability of the media. |
Expanded Polytetrafluoroethylene (ePTFE) Filtration Technology Media Developed by AAF Flanders® Engineers |
N/A Groundbreaking ePTFE media was engineered by AAF Flanders® research and design teams. Media production, testing, and packaging are all performed in AAF Flanders® (ISO 7) ultra-modern controlled environment, eliminating the potential for contamination of the filter during manufacturing. |
Energy Conservation |
N/A The ePTFE pleated pack resistance is a minimum of 30 % lower than conventional micro fiberglass media, a factor contributing to greatly reducing fan energy consumption. AAF Flanders® pleating method, using intermittent polyamide separators, allows more open media area and optimizes pleat pack resistance. |
Perfect Filter Media |
N/A Compared with microglass media, ePTFE media provides superior benefits, including inert chemical properties, more uniform fiber distribution, and smaller fiber diameters and pore size, which reduces resistance with higher filtration performance to achieve substantial energy savings. |
Sturdy Construction |
N/A
Tooling environments often produce harmful and corrosive by-products. The MEGAcel® filter is extremely resistant to these harsh conditions and also offers superior efficiency and pressure drop characteristics. Manufactured with high quality ePTFE media, the MEGAcel® filter is water resistant and meets the requirements of UL 900 and ULC S111. The media pack is permanently attached to an anodized extruded aluminum frame with a low off-gassing urethane adhesive. |
Chemical Advantages of Expanded Polytetrafluoroethylene (ePTFE) Filtration Technology Media |
N/A
Negligible off-gassing ePTFE media has smaller pore size and fiber diameter than micro fiberglass. These characteristics significantly reduce the levels of off-gassing impurities typical to microglass (which include boron, sodium, potassium, and silicon) to almost zero. High Corrosion Resistance ePTFE media has been proven to be resistant in highly corrosive environments, including alkaline, acid, and organic substances. All of these environments can be found in semiconductor manufacturing processes. Superior Water Resistance ePTFE media provides superior water resistance in comparison with microglass and low boron microglass media. |
State-of-the-Art Testing |
N/A
AAF Flanders® has established an air filtration testing methodology that is among the most comprehensive and accurate in the industry. Testing is essential in documenting filter efficiency and assisting in research and development of filtration products. AAF Flanders® testing facilities meet the highest standards for quality control. Every MEGAcel® filter is tested and certified, using procedures tailored to your specifications, to meet your performance requirements prior to shipping. |
Ongoing Quality Control |
N/A
Process control starts with sample flat sheets taken from each roll of media, tested to verify efficiency and pressure drop. The media is carefully pleated and assembled in the cell side designed for each specific application. The filter is then rigorously tested and certified to meet performance requirements. The filter is inspected for dimensional accuracy, automatically scanned by computer controlled scanning equipment for pinhole leaks, and tested for filtration efficiency and pressure drop. Every filter is labeled, identifying product code numbers, dimensions, a serial number, tested filter efficiency, and filter resistance at the rated airflow. Rigorous testing ensures customers receive products of the highest quality and performance to meet their stringent requirements, while reducing operating costs and providing the highest energy savings. |
High Efficiency Performance |
N/A
The MEGAcel® filter provides efficiency and performance far superior to the competition. AAF Flanders® is first in providing filters that meet rigorous I300I specifications for the manufacturing of 300 mm wafers. At a peak airflow of 100 FPM, Most Penetrating Particle Size (MPPS) efficiency is superior to the stringent requirements of 99.99995 % efficiency. The combination of advanced levels of efficiency and the lowest possible pressure drop makes MEGAcel® a simple choice for use in 450 mm, 300 mm, or 200 mm wafer production. |
Lowest Possible Pressure Drop |
N/A
Pressure drop is measured using a manometer as the test filter is subjected to a metered air volume. Testing on a volumetric basis is specified in the Institute of Environmental Sciences and Technology IEST-RP-CC007 recommended practice on ULPA filters. AAF Flanders® calculates the total square footage of usable media pack area (outside dimensions of filter minus the frame thickness and adhesive) and multiplies this number by 100 FPM to determine an accurate volumetric test flow (this value is approximately 720 CFM for a nominal 24"x 48" filter). This method simulates actual cleanroom airflow conditions, ensuring a true measurement of pressure drop. |
Additional Information |
N/A
The AAF Flanders® MEGAcel® line of filters is designed to meet semiconductor industry cleanroom filtration requirements for fabs, modular, mini, and microenvironments, as stated in the I300I specifications. Manufactured with high performance ePTFE media, MEGAcel® filters provide extremely high particulate filtration efficiencies, lower pressure drops, and negligible off-gassing.
|
Creative thinking may mean simply the realization that there’s no particular virtue in doing things the way they always have been done
~Rudolf Flesch
© 2018 Technical Equipment Sales. All Rights Reserved | Site created by Thomas Marketing Services
